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Hydrogen depth-profiling in chemical-vapor-deposited diamond films by high-resolution elastic recoil detection
2001
Applied Physics Letters
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We have measured the hydrogen depth profiles in chemical-vapor-deposited diamond films by elastic recoil detection. Depth resolution of ϳ0.23 nm is achieved using a high-resolution magnetic spectrometer. The hydrogen depth profile shows a sharp peak at surface, and the hydrogen coverage is estimated to be 1Ϯ0.3 ML, indicating formation of the monohydride structure. The surface peak has a small tail toward deeper region, which is ascribed to hydrogen atoms incorporated in a subsurface region.
doi:10.1063/1.1356452
fatcat:b7hif6dz45ftpf6ka6v22x27ka