A copy of this work was available on the public web and has been preserved in the Wayback Machine. The capture dates from 2020; you can also visit <a rel="external noopener" href="https://iopscience.iop.org/article/10.7567/1347-4065/ab147a/pdf">the original URL</a>. The file type is <code>application/pdf</code>.
<i title="Japan Society of Applied Physics">
<a target="_blank" rel="noopener" href="https://fatcat.wiki/container/pucchvqa2nd23o2rzoaa3xmd7u" style="color: black;">Japanese Journal of Applied Physics</a>
The application of quaternary In x Al y Ga 1−x−y N active regions is a promising path towards high efficiency UVB-light emitting diodes (LEDs). For the utilization of In x Al y Ga 1−x−y N, detailed knowledge of the interplay between growth parameters, adatom incorporation, optical and structural properties is crucial. We investigated the influence of the trimethylaluminium (TMAl) and trimethylindium (TMIn) flux on the composition and luminescence properties of In x Al y Ga 1−x−y N layers by<span class="external-identifiers"> <a target="_blank" rel="external noopener noreferrer" href="https://doi.org/10.7567/1347-4065/ab147a">doi:10.7567/1347-4065/ab147a</a> <a target="_blank" rel="external noopener" href="https://fatcat.wiki/release/n3fmmzu7xvh5djq7mymml3hm3q">fatcat:n3fmmzu7xvh5djq7mymml3hm3q</a> </span>
more »... i-mode scanning electron microscopy. We found that varying the molar TMIn flow from 0 to 17.3 μmol min −1 led to an InN concentration between 0% and 3.2% and an emission energy between 4.17 and 3.75 eV. The variation of the molar TMAl flow from 3.5 to 35.4 μmol min −1 resulted in a AlN composition between 7.8% and 30.7% with an emission energy variation between 3.6 and 4.1 eV. Cathodoluminescence hyperspectral imaging provided evidence for the formation of nanoscale InN-rich regions. Analyzing the emission properties of these InN-rich regions showed that their emission energy is inhomogeneous and varies by ≈150 meV. We provide evidence that the formation of these InN-rich regions is highly dependent on the AlN and InN composition of the layer and that their formation will strongly affect the performance of In x Al y Ga 1−x−y N LEDs.
<a target="_blank" rel="noopener" href="https://web.archive.org/web/20200325143738/https://iopscience.iop.org/article/10.7567/1347-4065/ab147a/pdf" title="fulltext PDF download" data-goatcounter-click="serp-fulltext" data-goatcounter-title="serp-fulltext"> <button class="ui simple right pointing dropdown compact black labeled icon button serp-button"> <i class="icon ia-icon"></i> Web Archive [PDF] <div class="menu fulltext-thumbnail"> <img src="https://blobs.fatcat.wiki/thumbnail/pdf/86/13/8613e16deef26bf8c4894ffc959c56ecba57c5d7.180px.jpg" alt="fulltext thumbnail" loading="lazy"> </div> </button> </a> <a target="_blank" rel="external noopener noreferrer" href="https://doi.org/10.7567/1347-4065/ab147a"> <button class="ui left aligned compact blue labeled icon button serp-button"> <i class="unlock alternate icon" style="background-color: #fb971f;"></i> Publisher / doi.org </button> </a>