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Nanoindentation Techniques for the Evaluation of Silicon Nitride Thin Films
Nanoindentation Techniques for the Evaluation of Silicon Nitride Thin Films Weston Thomas Mangin Silicon nitride thin films are of interest in the biomedical engineering field due to their biocompatibility and favorable tribological properties. Evaluation and understanding of the properties of these films under diverse loading and failure conditions is a necessary prerequisite to their use in biomedical devices. Three wafers of silicon nitride-coated silicon were obtained from Lawrencedoi:10.15368/theses.2016.170 fatcat:uqjeoumedvay5jgsfx4wzfwzcu