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Optimization of laser-damage resistance of evaporated hafnia films at 351nm
2008
Laser-Induced Damage in Optical Materials: 2008
Crystallites are present in typical evaporated hafnia films, negatively impacting laser-damage threshold (LDT). • Deposition rate and O 2 backfill pressure influence the refractive index of hafnia deposited by reactive e-beam evaporation. • Low deposition rate and high O 2 backfill pressure yields a porous, mechanically fragile film sensitive to changes in relative humidity. -sensitivity is apparent in LDT, with changes of the order of 20% for observed fluctuations in ambient relative humidity.
doi:10.1117/12.805383
fatcat:lxe4pjdwevdxrj6llepyu4tgyy