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Calculation of Desorption Parameters for Mg/Si(111) System
2009
e-Journal of Surface Science and Nanotechnology
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The method for calculation of desorption parameters developed for differential reflection spectroscopy is presented. It enables to study desorption and to control phase composition of film simultaneously. Spectra of differential reflectance ∆R/R of the film are initial data for the method. The method was used for Mg/Si(111) system. The desorption parameters for bulk Mg film were calculated and limitations of the method were found.
doi:10.1380/ejssnt.2009.816
fatcat:yqcob4v7yfc2rj4yt7i5d7xbcy