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The method for calculation of desorption parameters developed for differential reflection spectroscopy is presented. It enables to study desorption and to control phase composition of film simultaneously. Spectra of differential reflectance ∆R/R of the film are initial data for the method. The method was used for Mg/Si(111) system. The desorption parameters for bulk Mg film were calculated and limitations of the method were found.doi:10.1380/ejssnt.2009.816 fatcat:yqcob4v7yfc2rj4yt7i5d7xbcy