Optical and structural properties of InAs quantum dots in a GaAs matrix for a spectral range up to 1.7 μm
M. V. Maximov, A. F. Tsatsul'nikov, B. V. Volovik, D. A. Bedarev, A. Yu. Egorov, A. E. Zhukov, A. R. Kovsh, N. A. Bert, V. M. Ustinov, P. S. Kop'ev, Zh. I. Alferov, N. N. Ledentsov
(+3 others)
1999
Applied Physics Letters
We demonstrate the possibility of extending the spectral range of luminescence due to InAs quantum dots ͑QDs͒ in a GaAs matrix up to 1.7 m. Realization of such a long wavelength emission is related to formation of lateral associations of QDs during InAs deposition at low substrate temperatures ͑ϳ320-400°C͒. © 1999 American Institute of Physics. ͓S0003-6951͑99͒00242-9͔ In recent years self-organized quantum dots ͑QDs͒ 1 have found significant interest. One of the important advantages of QDs is
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... eir potential to shift the emission wavelength beyond the range available for quantum well ͑QW͒ structures on the same substrate. 2-4 Recently 1.3 m GaAs-based InAs QD lasers are shown to have low threshold current densities ͑Ͻ100 A/cm 2 ͒. 2,3 High temperature stability of threshold current, low internal losses, and good differential efficiency are also demonstrated. 3 For applications in long-haul transmitters, cost-effective 1.55 m emitting GaAs-based lasers are desirable. High-power 1.48 m GaAs-based devices could serve as pumps for optical-fiber amplifiers. In this letter we show that a spectral range up to 1.75 m can be covered by InAs QDs in a GaAs matrix. The main approach to reach long wavelength emission is using lateral associates of QDs which were earlier observed in the upper stacks of vertically coupled QDs. 4 Samples are grown by elemental-source molecular-beam epitaxy ͑MBE͒ on GaAs ͑001͒ substrates using a Riber-32 MBE system. The evolution of the surface morphology is studied in situ, employing reflection high energy electron diffraction ͑RHEED͒. The growth procedure is as follows. After oxide desorption, a 0.5-m-thick GaAs buffer is grown at 600°C followed by a 2 nm/2 nm GaAs-AlAs short period superlattice ͑ten periods͒ and a 100 nm GaAs layer. Then the substrate temperature is lowered to 300-480°C and the QDs are deposited. Afterwards the dots are overgrown by 10 nm of GaAs at the same substrate temperature. The temperature is then increased again to 600°C and a 20-nm-thick GaAs layer is grown. This layer is followed by six periods of 2 nm/2 nm GaAs-AlAs short period superlattice and 5-nmthick GaAs cap layer for surface protection. The sample geometry enables optical studies as well as cross-section and plan-view ex situ characterization using transmission elec-tron microscopy ͑TEM͒ and high resolution electron microscopy ͑HREM͒. TEM and HREM studies are performed using a high voltage JEOL JEM1000 ͑1 MV͒ microscope. Photoluminescence ͑PL͒ is excited by an Ar ϩ laser and detected by Ge or InSb photodiodes. The spectra are corrected according to the spectral sensitivity curves. For photoluminescence excitation ͑PLE͒ experiments, samples are mounted into a continuous flow He cryostat at 6 K. PLE spectra are recorded using the light of a halogen lamp dispersed through a monochromator. Structural and optical properties of QDs deposited at temperatures of 460-520°C were studied in our previous work and by other researchers. 5,6 It was shown that deposition of 4 ML of InAs leads to the formation of a dense array of QDs having pyramidal shape with a square base. 6 The principal axes of the pyramid's base are close to the ͗100͘ or ͗010͘ directions. 6 For QDs grown at 520°C the average length of the pyramid base is 18 nm with the dot density about 2ϫ10 10 cm Ϫ2 . A reduction of the substrate temperature to 460°C leads to a decrease of the average length of the dot base to 12 nm and to an increase in the density of QDs to 1ϫ10 11 cm Ϫ2 . These QDs demonstrate bright PL emission in the range of 1.07-1.1 eV at 10 K. We note that the density of QDs deposited at 460°C is so high that lateral interaction effects via the strain fields during the QDs formation become important and govern the QD arrangement. 7 One can expect that a further reduction of substrate temperature during InAs deposition will result in a further increase in the density of QDs making the lateral interaction of QDs more important. Indeed, TEM studies of the samples deposited at 325-350°C demonstrate that the QD density can increase up to 10 12 cm Ϫ2 , while the QD size decreases down to 6-7 nm. However, an increase in the deposited thickness above 2 ML results in a qualitative change in the arrangement of QDs. Figure 1 shows plan-view ͑a͒ and the cross-section ͑b͒ TEM images of a sample with QDs formed by 4 ML of InAs deposited at 325°C. Individual QDs with a size of about 10 nm are seen in this image. Their areal density is about a͒ Also at the
doi:10.1063/1.125010
fatcat:6ysghxtyhbfa5ilpocbepolr5m