Fractal capacitors

H. Samavati, A. Hajimiri, A.R. Shahani, G.N. Nasserbakht, T.H. Lee
1998 IEEE Journal of Solid-State Circuits  
A linear capacitor structure using fractal geometries is described. This capacitor exploits both lateral and vertical electric fields to increase the capacitance per unit area. Compared to standard parallel-plate capacitors, the parasitic bottomplate capacitance is reduced. Unlike conventional metal-to-metal capacitors, the capacitance density increases with technology scaling. A classic fractal structure is implemented with 0.6-m metal spacing, and a factor of 2.3 increase in the capacitance
more » ... r unit area is observed. It is shown that capacitance boost factors in excess of ten may be possible as technology continues to scale. A computer-aided-design tool to automatically generate and analyze custom fractal layouts has been developed.
doi:10.1109/4.735545 fatcat:yl7o7eocgngy5d65vmk6473h54