Detection of Foreign Material Included in LCD Panels
液晶パネルの層間異物検査

Makoto SHIMIZU, Akira ISHII, Toshio NISHIMURA
2002 Journal of the Japan Society for Precision Engineering  
doi:10.2493/jjspe.68.239 fatcat:ls2fijrdwvdbrimfzpz6g5j354