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21pXJ-6 Study of the interface structure of Fe silicide on the Si surface with X-ray diffraction
21pXJ-6 X線回折によるSi(111)表面上のFeシリサイド薄膜構造解析(表面界面構造,領域9,表面・界面,結晶成長)

K. Sekiguchi, Y. Iwasawa, T. Nojima, D. Arai, Wolfgang Vobegeli, T. Shirasawa, T. Takahashi, K. Hattori, A. Hattori, Y. Wakabayashi
2007 Meeting Abstracts of the Physical Society of Japan (Nihon Butsuri Gakkai koen gaiyoshu)  

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doi:10.11316/jpsgaiyo.62.2.4.0_912_3 fatcat:z62qsk2gefcqtdrfmkj6t4qrpy
lang:ja
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K. Sekiguchi, Y. Iwasawa, T. Nojima, D. Arai, Wolfgang Vobegeli, T. Shirasawa, T. Takahashi, K. Hattori, A. Hattori, Y. Wakabayashi. "21pXJ-6 Study of the interface structure of Fe silicide on the Si surface with X-ray diffraction." Meeting Abstracts of the Physical Society of Japan (Nihon Butsuri Gakkai koen gaiyoshu) 62.2.4.0 (2007) 912