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Examination of Film Thickness Dependence on Acoustic Impedance of Gold and Chromium Thin Films by Scanning Acoustic Microscopy
International Journal of Advances in Engineering and Pure Sciences
Thickness induced changes in acoustic impedance of gold (Au) and chromium (Cr) thin films are studied with scanning acoustic microscopy (SAM). Thin films are produced by thermal evaporation technique on BK7 glass substrates with varying thicknesses between 40 nm to 200 nm. In acoustic impedance (AI) mode, the microscope generates two-dimensional acoustic impedance maps of the thin films and micrometer resolution helps determining the surface defects on these films. On the other hand, acousticdoi:10.7240/jeps.943771 fatcat:nzx7tmya6fdh3cqwtn57dbzmcy