Mesa diaphragm-based Fabry-Perot optical MEMS pressure sensor

Yi-Xian Ge, Ming Wang, Hai-Tao Yan
2008 2008 1st Asia-Pacific Optical Fiber Sensors Conference  
Abstract⎯An optical micro electron mechanical system (MEMS) pressure sensor with a mesa membrane is presented. The operating principle of the MEMS pressure sensor is expatiated by the Fabry-Perot (F-P) interference and the relation between deflection and pressure is analyzed. Both the mechanical model of the mesa structure diaphragm and the signal averaging effect is validated by simulation, which declares that the mesa structure diaphragm is superior to the planar one on the parallelism and
more » ... parallelism and can reduce the signal averaging effect. Experimental results demonstrate that the mesa structure sensor has a reasonable linearity and sensitivity. Index Terms⎯Fabry-Perot interference, micro electron mechanical system, mesa structure, optical fiber sensor, parallelism.
doi:10.1109/apos.2008.5226325 fatcat:rr6dln54dffcfoffknce2q6tuq