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Millimeter wave detection by thermopile antenna
2010
Procedia Engineering
In this paper a novel MEMS thermopile structure is proposed, which consist of linearly arranged p-and n-type polysilicon strips instead of the conventional loop-like configuration. It is shown that these devices sense the millimeter wave radiation beyond the infrared. The polarity and frequency dependence of the sensitivity prove that these strips behave as absorbing antennas towards the microwave/millimeter wave radiation. The induced current is calculated having a maximum in the geometrical
doi:10.1016/j.proeng.2010.09.172
fatcat:h3mhydrd3jbllnbf2qhmrfpllq