Development of Real-Time Thermal Displacement Compensation System
リアルタイム熱変位補正システムの開発

Yuji SASAKI, Hideki IWAI, Yoshio WAKAZONO, Yasumasa SAKURAI, Yuji OKA
2017 Journal of the Japan Society for Precision Engineering  
doi:10.2493/jjspe.83.121 fatcat:2e4qx72pfnf7zlmp6xxkzmf76e