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RCE photodetectors based on VCSEL structures
1999
IEEE Photonics Technology Letters
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We have fabricated vertical-cavity surface-emitting lasers (VCSELs) based top illuminating resonant cavity enhanced (RCE) detectors simply by partially removing top mirror pairs of a VCSEL structure by wet-chemical or dry etching. The observed maximum quantum efficiency is 73 % with a spectral full width half maximum (FWHM) of about 1.7 nm. This particular RCE detector was fabricated by etching away eight top mirror pairs of a VCSEL structure, with 15.5 top mirror pairs remaining. The widest
doi:10.1109/68.789720
fatcat:pymxqohbm5donobkrvwyuqw2ga