Nanoimprint Lithography - Next Generation Nanopatterning Methods for Nanophotonics Fabrication [chapter]

Jukka Viheril, Tapio Niemi, Juha Kontio, Markus Pess
2010 Recent Optical and Photonic Technologies  
Source: Recent Optical and Photonic Technologies, Book edited by: Ki Young Kim, ISBN 978-953-7619-71-8, pp. 450, January 2010, INTECH, Croatia, downloaded from SCIYO.COM www.intechopen.com Recent Optical and Photonic Technologies Edited by Ki Young Kim ISBN 978-953-7619-71-8 Hard cover, 450 pages Publisher InTech
doi:10.5772/6917 fatcat:wxsrfwku6rg67gonhrplmnhlye