The infrared spectra of chlorinatedand hydrogenated amorphous silicon have been measured. In add3tion to the hydrogen induced bands at 2110, 1990, 885, 840 and 640 cm-1, we observe two new modes at 545 cm-1 (Si-C1 stretching) and 500 cm-1 ( Si TO modes induced by chlorine). Observation of the 545 cm-l band proves that chlorine acts as a dangling bond terminator. Upon annealing, some of the Si-C1 groups transform into SiClq molecules (SiC14 stretching at 615 cm-1). A good agreement is found

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... en the total amount of chlorine determined by electron microprobe analysis and the value estimated from the integrated strength of the Si-C1 stretching mode.