Research on fuze microswitch based on corona discharge effect

Wen-zhong Lou, Heng-zhen Feng, Jin-kui Wang, Yi Sun, Yue-cen Zhao
2020 Defence Technology  
Research on fuze microswitch based on corona discharge effect, Defence Technology, https://doi. Abnormal voltages such as electrostatic, constant current, and strong electromagnetic signals can erroneously trigger operation of MEMS pyrotechnics and control systems in a fuze, which may result in casualties. This study designs a solid-state micro-scale switch by combining the corona gas discharge theory of asymmetric electric fields and Peek's Law. The MEMS switch can be transferred from "off" to
more » ... "on" through the gas breakdown between the corona electrodes. In the model, one of the two electrodes is spherical and the other flat, so a non-uniform electric field is formed around the electrodes. The theoretical work is as follows. First, the relation among the radius of curvature of the spherical electrode, the discharge gap, and the air breakdown voltage is obtained; to meet the low voltage (30-60 V) required to drive the MEMS switch, the radius of curvature of the spherical electrode needs to be 10-50 µm and the discharge gap between the two electrodes needs to be 9-11 µm. Second, the optimal ratio ε is introduced to parameterize the model. Finally, the corona discharge structural parameters are determined by comparing the theoretical and electric field simulation results. The switch is then fabricated via MEMS processing. A hardware test platform is built and the performing chip tested. It is found that when the electrode gap is 9 µm, the electrostatic voltage is at least 37.3 V, with an error of 2.6% between the actual and theoretical air breakdown voltages. When the electrode gap is 11 µm, the electrostatic voltage is at least 42.3 V, with an error of 10.5% between the actual and theoretical air breakdown voltages. Both cases meet the design requirements. Technology, member of the International IEC Standard TC47, editorial board member of the Journal of Detection and Control, etc. He had published more than 110 academic papers in related fields, of which more than 80 are included in SCI and EI, and had over 40 authorized invention patents. J o u r n a l P r e -p r o o f HENG-ZHEN FENG was born in Inner Mongolia, CHINA in 1991. the email address:fenghengzhen@gmail.com. He received the B.S. and M.S. degrees in instrument science and technology from North university of China. He is currently pursuing the Ph.D. degree at Beijing Institute of Technology, CHINA. He became a Member (M) of IEEE in 2017. From 2013 to 2017, He is the author of 7 articles, and 3 inventions. His research interests include high-pressure and high-overload accelerometer design, processes and applications. Now, he is working on the design and application of micro actuators in high dynamic environments. Jin-kui Wang was born in 1993, the email address:wangjinkui2013@126.com. He studied at the School of Mechatronical Engineering, Beijing Institute of Technology, Ph.D. The main research directions of the doctoral level are: microsystems and sensing technology. Focusing on the microsystem dynamic sensing and complex cooperative networks. Yi Sun was born in 1991, the email address: sun773870@126.com. He studied at the School of Mechatronical Engineering, Beijing Institute of Technology, Ph.D. The main research directions of the doctoral level are: microsystems and sensing technology. Yue-cen Zhao was born in 1997, the email address: zhaoyc0911@163.com. He studied at the School of Mechatronical Engineering, Beijing Institute of Technology, Master. The main research directions are: microsystems and Gas breakdown actuator. J o u r n a l P r e -p r o o f Research on fuze microswitch based on corona discharge effect Abstract: Abnormal voltages such as electrostatic, constant current, and strong electromagnetic signals can erroneously trigger operation of MEMS pyrotechnics and control systems in a fuze, which may result in casualties. This study designs a solid-state micro-scale switch by combining the corona gas discharge theory of asymmetric electric fields and Peek's Law. The MEMS switch can be transferred from "off" to "on" through the gas breakdown between the corona electrodes. In the model, one of the two electrodes is spherical and the other flat, so a non-uniform electric field is formed around the electrodes. The theoretical work is as follows. First, the relation among the radius of curvature of the spherical electrode, the discharge gap, and the air breakdown voltage is obtained; to meet the low voltage (30-60 V) required to drive the MEMS switch, the radius of curvature of the spherical electrode needs to be 10-50 µm and the discharge gap between the two electrodes needs to be 9-11 µm. Second, the optimal ratio ε is introduced to parameterize the model. Finally, the corona discharge structural parameters are determined by comparing the theoretical and electric field simulation results. The switch is then fabricated via MEMS processing. A hardware test platform is built and the performing chip tested. It is found that when the electrode gap is 9 µm, the electrostatic voltage is at least 37.3 V, with an error of 2.6% between the actual and theoretical air breakdown voltages. When the electrode gap is 11 µm, the electrostatic voltage is at least 42.3 V, with an error of 10.5% between the actual and theoretical air breakdown voltages. Both cases meet the design requirements. Keywords: Corona discharge, Peek's law, Optimal ratio ε, MEMS switch. J o u r n a l P r e -p r o o f Research on fuze microswitch based on corona discharge effect Abstract: Abnormal voltages such as electrostatic, constant current, and strong electromagnetic signals can erroneously trigger operation of MEMS pyrotechnics and control systems in a fuze, which may result in casualties. This study designs a solid-state micro-scale switch by combining the corona gas discharge theory of asymmetric electric fields and Peek's Law. The MEMS switch can be transferred from "off" to "on" through the gas breakdown between the corona electrodes. In the model, one of the two electrodes is spherical and the other flat, so a non-uniform electric field is formed around the electrodes. The theoretical work is as follows. First, the relation among the radius of curvature of the spherical electrode, the discharge gap, and the air breakdown voltage is obtained; to meet the low voltage (30-60 V) required to drive the MEMS switch, the radius of curvature of the spherical electrode needs to be 10-50 µm and the discharge gap between the two electrodes needs to be 9-11 µm. Second, the optimal ratio ε is introduced to parameterize the model. Finally, the corona discharge structural parameters are determined by comparing the theoretical and electric field simulation results. The switch is then fabricated via MEMS processing. A hardware test platform is built and the performing chip tested. It is found that when the electrode gap is 9 µm, the electrostatic voltage is at least 37.3 V, with an error of 2.6% between the actual and theoretical air breakdown voltages. When the electrode gap is 11 µm, the electrostatic voltage is at least 42.3 V, with an error of 10.5% between the actual and theoretical air breakdown voltages. Both cases meet the design requirements.
doi:10.1016/j.dt.2020.08.002 fatcat:btzehqp7une43askj6uigsn4r4