A Demodulation Algorithm for Periodically In-Plane Vibrating MEMS Based on a Stroboscopic Micro-Visual System

Minhui Yu, Mei Sang, Cheng Guo, Ruifeng Zhang, Fan Zhao, Hongguang Liu, Tiegen Liu
2021 Microscopy and Microanalysis  
A high-frequency short-pulsed stroboscopic micro-visual system was employed to capture the transient image sequences of a periodically in-plane working micro-electro-mechanical system (MEMS) devices. To demodulate the motion parameters of the devices from the images, we developed the feature point matching (FPM) algorithm based on Speeded-Up Robust Features (SURF). A MEMS gyroscope, vibrating at a frequency of 8.189 kHz, was used as a testing sample to evaluate the performance of the proposed
more » ... gorithm. Within the same processing time, the SURF-based FPM method demodulated the velocity of the in-plane motion with a precision of 10−5 pixels of the image, which was two orders of magnitude higher than the template-matching and frame-difference algorithms.
doi:10.1017/s1431927621013817 pmid:35177142 fatcat:5fusi2jp2ngmxf745v4jb5fu5y