A multi-axis MEMS sensor with integrated carbon nanotube-based piezoresistors for nanonewton level force metrology

Michael A Cullinan, Robert M Panas, Martin L Culpepper
2012 Nanotechnology  
This paper presents the design and fabrication of a multi-axis microelectromechanical system (MEMS) force sensor with integrated carbon nanotube (CNT)-based piezoresistive sensors. Through the use of proper CNT selection and sensor fabrication techniques, the performance of the CNT-based MEMS force sensor was increased by approximately two orders of magnitude as compared to current CNT-based sensor systems. The range and resolution of the force sensor were determined as 84 µN and 5.6 nN,
more » ... and 5.6 nN, respectively. The accuracy of the force sensor was measured to be better than 1% over the device's full range.
doi:10.1088/0957-4484/23/32/325501 pmid:22825308 fatcat:eexx773bwfefhdjbnsgxuzwtwm