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In this study, for the practical use of reactively alloyed NiAl as a structural material, its mechanical reliability is evaluated. An Al/Ni multilayer film is attractive as a local heat source for soldering. To investigate the difference in mechanical characteristics between as-deposited Al/ Ni multilayer films and reactively alloyed NiAl films, quasistatic uniaxial tensile tests and stress relaxation tests were conducted. A higher Young's modulus and a higher strength were obtained in the NiAldoi:10.18494/sam.2016.1226 fatcat:jhjz3rqsivg3rmknzlvkwzahmy