Digitaiization of Dynamic Measurement of Nanometer-order Displacement Using Heterodyne Laser Interferometry
ヘテロダイン干渉法による動的変位計測のディジタル化

Yasuhide TAKAHASHI, Takeshi NAKAMURA, Da Jun ZIAO
2002 Journal of the Japan Society for Precision Engineering  
doi:10.2493/jjspe.68.1436 fatcat:i62wgzvhfbde3f4dwhtzyfpism