Novel applications of MOEMS display and imaging

Ming C. Wu, Mary-Ann Maher, Harold D. Stewart
2005 Micromachining and Microfabrication Process Technology X  
Significant progresses have been made in MOEMS for display, imaging, telecommunication, and bioinstrumentation applications. This talk will first provide an overview of the recent advances in micromirror technologies. Then it will discuss three novel applications using MEMS micromirrors. First, a large port count wavelength-selective switch using a one-dimensional array of two-axis analog micromirrors will be described. Then the fabrication and packaging of twoaxis micromirrors for in vivo
more » ... copic optical coherence tomography (OCT) imaging will be presented. Finally a new "optoelectronic tweezers" for manipulating microparticles and biological cells using direct images of MOEMS spatial light modulators will be described.
doi:10.1117/12.608014 fatcat:w2ulz54ozbhixhtqd4wur23gly