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Novel applications of MOEMS display and imaging
2005
Micromachining and Microfabrication Process Technology X
Significant progresses have been made in MOEMS for display, imaging, telecommunication, and bioinstrumentation applications. This talk will first provide an overview of the recent advances in micromirror technologies. Then it will discuss three novel applications using MEMS micromirrors. First, a large port count wavelength-selective switch using a one-dimensional array of two-axis analog micromirrors will be described. Then the fabrication and packaging of twoaxis micromirrors for in vivo
doi:10.1117/12.608014
fatcat:w2ulz54ozbhixhtqd4wur23gly