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カラムナープラズマCVDによるSiN_xの成膜 : 非発光型ディスプレイ関連 : 情報ディスプレイ
SiN_x films deposited by CP-CVD methods
1993
ITE Technical Report
SiN_x films deposited by CP-CVD methods
Preserved Fulltext
The new columnar plasma chemical vapor
doi:10.11485/tvtr.17.11_43
fatcat:yvyj5ekrzbdtlj3rzn3kvhnkjy