The effect on the metallurgical structure and wear behavior of Al-Si alloy and steel produced by nitrogen ion implantation and ion beam mixing deposition (simultaneous nitrogen ion implantation and Ti vapor deposition) using an ion beam source were studied. A combination of X-ray diffraction, Auger electron spectroscopy (AES) and X-ray photoelectron spectroscopy (XPS) was used to determine the metallurgical structure and chemical composition, and to investigate. The chemical bonding state of

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... ion treated surfaces. X-ray diffraction data showed that TiN films were formed at room temperature by ion beam mixing treatment. It is demonstrated, that a mixing layer was observed between the substrate and TiN film. AlN was observed when nitrogen ions were implanted in Al-Si alloy. The pin-on disk wear test showed a decrease in the coefficient of friction and an increase in wear resistance for surface treated by both nitrogen ion implantation and ion beam mixing.