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Materials Science Forum
Introduction of pulse plasma power supply is one of the major contributions to plasma surface engineering. The voltage and current waveforms of nitrogen and nitrogen/hydrogen glow discharges in the vacuum total pressure range from 0.1 to 15 mbar were recorded and analyzed concerning the shape, typical operating values and the influence of surface treatment process parameters. It was found that the waveform shape of the voltage and current contains information on pulse generator outputdoi:10.4028/0-87849-971-7.315 fatcat:jbdwew67orafhlz4vf3uvd3nki