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Sub-38 nm resolution tabletop microscopy with 13 nm wavelength laser light
We have acquired images with a spatial resolution better than 38 nm by using a tabletop microscope that combines 13 nm wavelength light from a high-brightness tabletop laser and Fresnel zone plate optics. These results open a gateway to the development of compact and widely available extreme-ultraviolet imaging tools capable of inspecting samples in a variety of environments with a 15-20 nm spatial resolution and a picosecond time resolution.doi:10.1364/ol.31.001214 pmid:16642063 fatcat:57anghqtqbauhjakrvtagopb4a