A Further Improvement in the Gaussian ϕ(ϱ) Approach for Matrix Correction in Quantitative Electron Probe Microanalysis

G. F. Bastin, H. J. M. Heijligers, F. J. J. van Loo
1986 Scanning  
1986). A further improvement in the Gaussian (z) approach for matrix correction in quantitative electron probe microanalysis. Scanning, 8(2), 45-67. Both effects, called the R-factor (backscattering) and the S-factor (stopping power), respectively, are then combined to make up for the so-called atomic number correction, whicQ. is usually expressed by Z. This Z-factor is proportional""'1i) the total number of ionisations generated in the target. -Secondly, it is necessary to adopt some kind of
more » ... dopt some kind of (Qz) curve (number of ionisations , as a function of mass depth QZ) in order to calculate how much of the generated intensity is lost by absorption in the target on its way to the spectrometer. The ratio between the emitted and the generated intensity is called the A-factor, which is more commonly know~as the quantity F (X), in which Abstract An improved correction model for quantitative electron probe microanalysis, based on modifications of the Gaussian (Qz) approach, originally introduced by Packwood and Brown, is presented. The improvements consist of better equations for the input parameters of this model which have been obtained by fitting to experimental (Qz) data. The new program has been tested on 627 measurements for medium to heavy elements (Z> 11) and on 117 carbon measurements with excellent results: an r.m.s. value of 2.99% in the former case and 4.
doi:10.1002/sca.4950080204 fatcat:6wva3mfmfff6valthf2vjxfuku