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This paper presents a new approach to the design of confocal differential heterodyne interferometer (CDHI) which is a combination of differential heterodyne interferometer (DHI) with confocal laser scanning microscopy (CLSM). The CDHI can measure a step height over a quarter of wavelength of the light source, which can not be accurately measured by DHI and CLSM respectively. The approach is that it utilizes a beam scanning method instead of transporting a sample to be measured. The measurementdoi:10.1080/15599610701261076 fatcat:vswuonex3fhfzdajccpfmxb23e