A copy of this work was available on the public web and has been preserved in the Wayback Machine. The capture dates from 2018; you can also visit the original URL.
The file type is
The conference is dedicated to the discussion on science and technology in the field of microprocesses and nanotechnology using photon, electron, ion, other energetic particles and nanomaterials. The scope of this conference covers not only the fundamental physics of the microprocesses and nanotechnology, and their application, but also materials science and devices physics, and their applications to the fields of bio, medical information, and communication technologies. More than 500doi:10.7567/jjap.54.06f001 fatcat:7thmdmxvozbwtifdaqy5dzifua