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Microprocesses and Nanotechnology
2015
Japanese Journal of Applied Physics
The conference is dedicated to the discussion on science and technology in the field of microprocesses and nanotechnology using photon, electron, ion, other energetic particles and nanomaterials. The scope of this conference covers not only the fundamental physics of the microprocesses and nanotechnology, and their application, but also materials science and devices physics, and their applications to the fields of bio, medical information, and communication technologies. More than 500
doi:10.7567/jjap.54.06f001
fatcat:7thmdmxvozbwtifdaqy5dzifua