DC magnetron sputtered ITO films applied with indium tin oxide targets
酸化物ターゲットを用いたDCスパッタITO膜

Hiroshi KIMURA, Hiroshi WATANABE, Satoshi ISHIHARA, Yoshio SUZUKI, Takashi ITO
1987 Shinku  
doi:10.3131/jvsj.30.546 fatcat:yr65dimscrdqzaetx6gza7ozcy