Al/アモルファス半導体系二層膜の結晶化とパターン形成
Crystallization and pattern formation in bilayer films of Al/amorphous-semiconductor systems

Minoru DOI, Futoshi KATSUKI, Hiroshi KUMAGAI, Makoto TAKAGI
2007 Keikinzoku/Journal of Japan Institute of Light Metals  
doi:10.2464/jilm.57.30 fatcat:sxa3zgcbwfbklfchnd4kqfp3yq