Application of hierarchical cascading technique to finite element method simulation in bulk acoustic wave devices

Xinyi Li, Jingfu Bao, Yulin Huang, Benfeng Zhang, Tatsuya Omori, Ken-ya Hashimoto
2018 Japanese Journal of Applied Physics  
doi:10.7567/jjap.57.07lc08 fatcat:5xd3pgvjpneq3a7ekj76ft5tfa