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Fabrication of High Reflection Gratings in Single Crystal Diamond by Reactive Ion Etching
2019
Symposium Latsis 2019 on Diamond Photonics - Physics, Technologies and Applications
unpublished
Preserved Fulltext
We demonstrate the design and fabrication of diffraction gratings in single crystal diamond substrates by metal mask deposition onto the diamond surface, e-beam lithography and ion beam etching for pattern transfer, and reactive ion etching.
doi:10.1364/dp.2019.124
fatcat:cetu2w443bgbrmbqe2hquhujfa