Fabrication of High Reflection Gratings in Single Crystal Diamond by Reactive Ion Etching

Gergely Huszka, Mehdi Naamoun, Niels Quack
2019 Symposium Latsis 2019 on Diamond Photonics - Physics, Technologies and Applications   unpublished
We demonstrate the design and fabrication of diffraction gratings in single crystal diamond substrates by metal mask deposition onto the diamond surface, e-beam lithography and ion beam etching for pattern transfer, and reactive ion etching.
doi:10.1364/dp.2019.124 fatcat:cetu2w443bgbrmbqe2hquhujfa