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Due-date based scheduling and control policies in a multiproduct semiconductor wafer fabrication facility
1998
IEEE transactions on semiconductor manufacturing
This paper focuses on lot release control and scheduling problems in a semiconductor wafer fab producing multiple products that have different due dates and different process flows. For lot release control, it is necessary to determine the type of a wafer lot and the time to release wafers into the wafer fab, while it is necessary to determine sequences of processing waiting lots in front of workstations for lot scheduling. New dispatching rules are developed for lot release control and
doi:10.1109/66.661295
fatcat:rbz2vqtpojaw5awto2r4ygotu4