Design and performance of a Near Ultra High Vacuum Helium Ion Microscope

R van Gastel, L Barriss, C Sanford, G Hlawacek, L Scipioni, A Merkle, D Voci, C Fenner, H Zandvliet, B Poelsema
2011 Microscopy and Microanalysis  
doi:10.1017/s1431927611005514 fatcat:nqayd5gbs5fbfhsqpz5ahhjsnm