High-Speed Deposition of Highly-Oriented Calcium Titanate Film by Laser CVD
レーザーCVDによる高配向チタン酸カルシウム膜の高速成長

Hirokazu KATSUI, Yuki KUMAGAI, Takashi GOTO
2015 Journal of the Japan Society of Powder and Powder Metallurgy  
Highly (011)-and (101)-oriented calcium titanate (CaTiO 3 ) films were synthesized by laser chemical vapor deposition (CVD) and the effect of deposition temperature on the morphology, orientation and deposition rate was investigated. (011)-oriented CaTiO 3 films having cone-like morphology with pyramidal facets were grown below 800 K. As the deposition temperature increased to 800-1000 K, the orientation of CaTiO 3 films changed from (011) to (101). The highly (101)-oriented CaTiO 3 films
more » ... the squarely faceted texture and the nano-pores formed along (011). The highest deposition rate was 230 μm h −1 , which was 10 times as great as that by conventional thermal CVD. KEY WORDS laser chemical vapor deposition, oriented texture, high-speed deposition, biomaterial 1) 3 2,3) 65 mass% Ca 10 (PO 4 ) 6 (OH) 2 , HAp HAp 4-8) Ca CaTiO 3 9,10) CaTiO 3 pH 11-15) CaTiO 3 sol-gel 15) 16) CVD 17,18)
doi:10.2497/jjspm.63.123 fatcat:jjkd6b3acbautnwffxk3lznmrm