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Interfacial structure and the atomic interactions between atoms a t interfaces in multilayers or nano-laminates have significant impact on the physical properties of these materials. A technique for t h e experimental evaluation of interfacial structure and interfacial structure effects is presented and compared to experiment. In this paper the impact of interfacial structure on the performance of x-ray, soft x-ray and extreme ultra-violet multilayer optic structures is emphasized. The paper isdoi:10.2172/14282 fatcat:234gf44lxnc2jpmcshzxb467tq