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Brief Measurement of Concentration Profiles of Impurities and Defects in Semiconductors
30a-YK-5 斜め研磨面上容量測定による半導体中不純物欠陥濃度分布の簡便測定

Masami MOROOKA
1998 Meeting Abstracts of the Physical Society of Japan (Nihon Butsuri Gakkai koen gaiyoshu)  

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doi:10.11316/jpsgaiyo.53.1.2.0_96_1 fatcat:5cyopgqu6fc6db2cqsb62fkmf4
lang:ja
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Masami MOROOKA. "Brief Measurement of Concentration Profiles of Impurities and Defects in Semiconductors." Meeting Abstracts of the Physical Society of Japan (Nihon Butsuri Gakkai koen gaiyoshu) 53.1.2.0 (1998) 96