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Materials for sustainable development
2012
MRS bulletin
Beam energies from 10 keV up to several 10s of MeV Beam currents from 100 micro-amps up to several milliamps Ion species, including H, He, B, P, As and others Single wafer or batch processing of wafers up to and including 8" In-air or in-vacuum cassette-to-cassette wafer handling Electrostatic and/or mechanical wafer clamping CUSTOMIZED PRODUCTION ION IMPLANTERS High Voltage Engineering Europa B.V.
doi:10.1557/mrs.2012.90
fatcat:3koqcc57xngbtjl2tgbz4govuy