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THE INFLUENCE OF CARBON AND BORON ATOMS ON THE OPTICAL AND ELECTRICAL PROPERTIES OF THIN FILM a-Si:H
2006
Modern physics letters B
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A series of undoped and p doped a-SiC:H samples have been made in the framework of a research plan for obtaining high quality p-type window layers by "Plasma Enhanced Chemical Vapor Deposition (PECVD)" technique from the mixtures of silane(SiH 4 ), methane(CH 4 ) and diborane(B 2 H 6 ) gases. For the optimization of the window layer, the dependence of the electrical (conductivity) and optical (bandgap) properties due to altered ratios of methane and diborane gases were investigated.
doi:10.1142/s0217984906012031
fatcat:mmy525vwazehvirzwioxk7kore