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17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest
This paper presents a new electrical coupling technique for implementation of high-order narrow-bandwidth programmable bandpass filters using micromechanical resonators. The concept of electrostatic coupling of closelyspaced microresonators for filter synthesis is introduced and its electromechanical modeling is presented. The electrostatic coupling approach eliminates the need for any physical coupling element in between the resonators and provides the highest degree of tunability and designdoi:10.1109/mems.2004.1290652 fatcat:2a6xlvcyvrbrvgp6qucdisfy5q