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Comparison of ferroelectric properties of Hf0.5Zr0.5O2 and HfO2 thin films
強誘電体薄膜Hf0.5Zr0.5O2およびHfO2の強誘電特性の比較

Yukinori Morita, Hiroyuki Ota, Shinji Migita
2020 Abstract book of Annual Meeting of the Japan Society of Vacuum and Surface Science  

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doi:10.14886/jvss.2020.0_241 fatcat:5rozp6o5hfhudirgezfwt5s7jq
lang:ja
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Yukinori Morita, Hiroyuki Ota, Shinji Migita. "Comparison of ferroelectric properties of Hf0.5Zr0.5O2 and HfO2 thin films." Abstract book of Annual Meeting of the Japan Society of Vacuum and Surface Science 2020.0 (2020) 241