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Noncontacting laser photocarrier radiometric depth profilometry of harmonically modulated band bending in the space-charge layer at doped SiO2‐Si interfaces
2005
Journal of Applied Physics
Laser infrared photocarrier radiometry ͑PCR͒ was used with a harmonically modulated low-power laser pump and a superposed dc superband-gap optical bias ͑a secondary laser beam͒ to control and monitor the space-charge-layer ͑SCL͒ width in oxidized p-Si-SiO 2 and n-Si-SiO 2 interfaces ͑wafers͒ exhibiting charged interface-state related band bending. Applying the theory of PCR-SCL dynamics ͓A. Mandelis, J. Appl. Phys. 97, 083508 ͑2005͔͒ to the experiments yielded various transport parameters of
doi:10.1063/1.1850197
fatcat:yqebhefuynblxaajiuvpkvfmfa