Editorial Advisory Board Synthesis and Characterization of Nickel Ferrite (NiFe 2 O 4 ) Nanoparticles with Silver Addition for H 2 S Gas Detection Evaluation of Anchoring Materials for Ultra-Sensitive Biosensors Modified with Au Nanoparticles and Enzymes Shock Resistance of MEMS Capacitive Accelerometers

Usa Young, Li
Hua, National Starch and Chemical Company   unpublished
With deeper research of silicon micro accelerometer, and its wider applications in the commercial fields such as drilling, consumer electronics, automotive industry, and in special military field, the device's shock resistance has been an urgent issue. The paper presents a theoretical approach of the micro structure's shock response, and focuses on the finite element impact dynamic simulation considering the contact effects of stoppers. A kind of MEMS capacitive accelerometers are designed and
more » ... s are designed and fabricated. Failure types due to different shock circumstances are investigated, and experimental estimation of the micro-structure's three-orientation shock resistibility is analyzed, using Hopkinson Pressure Bar (HPB) apparatus. Results indicate that beams' stiffness and stoppers' areas are the key factors to determine the shock resistance, and pulse duration also plays a critical role in the shock effects of micro-machined structures.