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Hua, National Starch and Chemical Company
With deeper research of silicon micro accelerometer, and its wider applications in the commercial fields such as drilling, consumer electronics, automotive industry, and in special military field, the device's shock resistance has been an urgent issue. The paper presents a theoretical approach of the micro structure's shock response, and focuses on the finite element impact dynamic simulation considering the contact effects of stoppers. A kind of MEMS capacitive accelerometers are designed andfatcat:4vtikpbhpfd7hjugpl3dkeir4a