A Kinetic Study of Chemical Vapor Deposition of AlN/TiN Composite Film
常圧熱CVDによるAlN/TiN複合系成膜反応機構の解析

Yi Jun Liu, Toshio Osawa, Yasuyuki Egashira, Hiroshi Komiyama, Hee Joon Kim
1996 Kagaku kogaku rombunshu  
doi:10.1252/kakoronbunshu.22.1429 fatcat:ubmo2g6245ewnk4uv5ona6utg4