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Atomic Resolution Investigation of Ultra-Low Energy Ion-Implanted Monolayer TMDs Using Scanning Transmission Electron Microscopy

Michael Hennessy, Eoin Moynihan, Eoghan O'Connell, Stefan Rost, Manuel Auge, Minh Bui, Beata Kardynal, Hans Hofsäss, Ursel Bangert
2022 Microscopy and Microanalysis  

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doi:10.1017/s1431927622009692 fatcat:k3u5utz54rgo3ook57fpm3neoy
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Michael Hennessy, Eoin Moynihan, Eoghan O'Connell, Stefan Rost, Manuel Auge, Minh Bui, Beata Kardynal, Hans Hofsäss, Ursel Bangert. "Atomic Resolution Investigation of Ultra-Low Energy Ion-Implanted Monolayer TMDs Using Scanning Transmission Electron Microscopy." Microscopy and Microanalysis 28.S1 (2022) 2538-2540