High-speed one-dimensional spatial light modulator for Laser Direct Imaging and other patterning applications

Jan-Uwe Schmidt, Ulrike A. Dauderstaedt, Peter Duerr, Martin Friedrichs, Thomas Hughes, Thomas Ludewig, Dirk Rudloff, Tino Schwaten, Daniela Trenkler, Michael Wagner, Ingo Wullinger, Andreas Bergstrom (+7 others)
2014 MOEMS and Miniaturized Systems XIII  
Fraunhofer IPMS has developed a one-dimensional high-speed spatial light modulator in cooperation with Micronic Mydata AB. This SLM is the core element of the Swedish company's new LDI 5sp series of Laser-Direct-Imaging systems optimized for processing of advanced substrates for semiconductor packaging. This paper reports on design, technology, characterization and application results of the new SLM. With a resolution of 8192 pixels that can be modulated in the MHz range and the capability to
more » ... the capability to generate intensity gray-levels instantly without time multiplexing, the SLM is applicable also in many other fields, wherever modulation of ultraviolet light needs to be combined with high throughput and high precision. Downloaded From: http://proceedings.spiedigitallibrary.org/ on 03/11/2014 Terms of Use: http://spiedl.org/terms Proc. of SPIE Vol. 8977 89770O-2 Downloaded From: http://proceedings.spiedigitallibrary.org/ on 03/11/2014 Terms of Use: http://spiedl.org/terms Proc. of SPIE Vol. 8977 89770O-6 Downloaded From: http://proceedings.spiedigitallibrary.org/ on 03/11/2014 Terms of Use: http://spiedl.org/terms Proc. of SPIE Vol. 8977 89770O-8 Downloaded From: http://proceedings.spiedigitallibrary.org/ on 03/11/2014 Terms of Use: http://spiedl.org/terms
doi:10.1117/12.2036533 fatcat:54jz6676sfh6pd3eh7mmgmq5yq