Profiled attacks are widely considered to be the most powerful form of side-channel analysis attacks. A common form is known as Gaussian template attacks which fit a Gaussian distribution to better model the behavior of the target device. Since profiled attacks build the model based on a device identical to the target device, manufacturing variances are an important factor for the success of such attacks. With shrinking the feature size, the influence of manufacturing variation on the power

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... umption of integrated circuits increases. It has been warned that this issue might render template attacks less effective. We evaluate this assumption on an ASIC design manufactured in 40 nm technology. We characterize the introduced variation and show that these can be easily mitigated. By performing attacks on multiple samples of the same ASIC, we show that template attacks on small technology sizes are still successful. Keywords Template attacks • Nano-scale devices • Side-channel analysis attacks • Profiled side-channel attacks