MD Simulation of Ultra-Micro Cutting of Monocrystalline Silicon with Effects of Air

Yanjie LIU, Toyoshiro INAMURA, Nobuhiro TAKEZAWA
2006 JSME international journal. Series C, Mechanical systems, machine elements and manufacturing  
Effect of atmosphere in ultra-micro cutting has been analyzed using MD (molecular dynamics) simulation carried out in such a way that potentials of surface atoms of diamond tool and silicon workpiece are modified when either of them is exposed to atmosphere. The results of the simulation show that principal cutting force decreases if the rake face of a tool and/or the rear face of chips are exposed to atmosphere during cutting. This result is consistent with the result obtained in microcutting
more » ... ed in microcutting experiments carried out by the authors and also indicates an important role of atmosphere in ultra-sonic vibration cutting.
doi:10.1299/jsmec.49.70 fatcat:sudt55uvbnhujp7ailwipolcfm