The objective of this research has been to develop the chemistry and techniques for the application of hydrophobic coatings on polysilicon substrates from aqueous media with the ultimate goal of applying these techniques for preventing or reducing release as well as in use stiction in microelectromechanical structure devices. In this paper, the results obtained from a chemical system consisting of a water dispersible silane and a cationic surfactant are presented. Key experimental variables

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... have been investigated are the concentration of reactive silane and cationic surfactant, type of oxidation pretreatment, pH of the silane dispersion, and curing temperature.